Plasma processing apparatus

A plasma processing apparatus has a process chamber for receiving an article to be processed, a monitoring window forming part of the peripheral wall of the process chamber, a pressure leading-out port, gates, and a plasma generating device for forming an electric field and generating plasma in the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OKANO, HARUO, SHIRAISHI, TERUAKI, ENDO, TAMIO, HASEGAWA, ISAHIRO, KIKUCHI, KAZUO, KOYAMA, SHIRO, HORIOKA, KEIJI, OKUMURA, KATSUYA, ARAMI, JUNICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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