Method for forming a stable plasma

A method for forming a stable plasma, particularly in the high power and low pressure ranges. The method may be used in a plasma system such as that used for a plasma etch. First, the radio frequency power is turned on under low power and high pressure. The plasma is allowed to stabilize without tun...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NULTY, JAMES E
Format: Patent
Sprache:eng
Schlagworte:
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