Gas sensor having its heater and sensing layer on opposite sides of its substrate

A gas sensor that has its heater and sensing layer on opposite sides of the substrate. The gas sensor includes a buffer layer separating the gas-sensing layer from the substrate to improve mechanical strength and electrical properties. The heater is preferably formed of nickel paste and is provided...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIAW, CHIU-FONG, KU, JAMES C. H, CHEN, IRNG, TSAI, PING-PING, TZENG, MING-HANN
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A gas sensor that has its heater and sensing layer on opposite sides of the substrate. The gas sensor includes a buffer layer separating the gas-sensing layer from the substrate to improve mechanical strength and electrical properties. The heater is preferably formed of nickel paste and is provided on the back of the substrate.