Quantitative analyzing method by a secondary ion mass spectrometric method and a secondary ion mass spectrometer

A quantitative analyzing method by a secondary ion mass spectrometric method comprises the steps of: quantitatively analyzing the target element by the secondary ion mass spectrometric method with respect to a plurality of ion-implanted standard samples, while changing an implantation energy; and co...

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Bibliographische Detailangaben

Hauptverfasser:	KIMURA, HIDEKI, TANIGAKI, TAKESHIGE, HIRANO, TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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