Electronic microvalve apparatus and fabrication
An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an...
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| creator | OHNSTEIN THOMAS R |
| description | An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer. |
| format | Patent |
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In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.</description><language>eng</language><subject>ACTUATING-FLOATS ; BLASTING ; COCKS ; DEVICES FOR VENTING OR AERATING ; ENGINEERING ELEMENTS AND UNITS ; FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES ; FLUID-PRESSURE ACTUATORS ; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS ; HEATING ; HYDRAULICS OR PNEUMATICS IN GENERAL ; LIGHTING ; MECHANICAL ENGINEERING ; TAPS ; THERMAL INSULATION IN GENERAL ; VALVES ; WEAPONS</subject><creationdate>1993</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19930119&DB=EPODOC&CC=US&NR=5180623A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19930119&DB=EPODOC&CC=US&NR=5180623A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OHNSTEIN; THOMAS R</creatorcontrib><title>Electronic microvalve apparatus and fabrication</title><description>An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.</description><subject>ACTUATING-FLOATS</subject><subject>BLASTING</subject><subject>COCKS</subject><subject>DEVICES FOR VENTING OR AERATING</subject><subject>ENGINEERING ELEMENTS AND UNITS</subject><subject>FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES</subject><subject>FLUID-PRESSURE ACTUATORS</subject><subject>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</subject><subject>HEATING</subject><subject>HYDRAULICS OR PNEUMATICS IN GENERAL</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>TAPS</subject><subject>THERMAL INSULATION IN GENERAL</subject><subject>VALVES</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1993</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNB3zUlNLinKz8tMVsjNTC7KL0vMKUtVSCwoSCxKLCktVkjMS1FIS0wqykxOLMnMz-NhYE1LzClO5YXS3Azybq4hzh66qQX58anFBYnJqXmpJfGhwaaGFgZmRsaOxoRVAAC-gSq4</recordid><startdate>19930119</startdate><enddate>19930119</enddate><creator>OHNSTEIN; THOMAS R</creator><scope>EVB</scope></search><sort><creationdate>19930119</creationdate><title>Electronic microvalve apparatus and fabrication</title><author>OHNSTEIN; THOMAS R</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US5180623A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1993</creationdate><topic>ACTUATING-FLOATS</topic><topic>BLASTING</topic><topic>COCKS</topic><topic>DEVICES FOR VENTING OR AERATING</topic><topic>ENGINEERING ELEMENTS AND UNITS</topic><topic>FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES</topic><topic>FLUID-PRESSURE ACTUATORS</topic><topic>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</topic><topic>HEATING</topic><topic>HYDRAULICS OR PNEUMATICS IN GENERAL</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>TAPS</topic><topic>THERMAL INSULATION IN GENERAL</topic><topic>VALVES</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>OHNSTEIN; THOMAS R</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OHNSTEIN; THOMAS R</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Electronic microvalve apparatus and fabrication</title><date>1993-01-19</date><risdate>1993</risdate><abstract>An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES FLUID-PRESSURE ACTUATORS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS |
| title | Electronic microvalve apparatus and fabrication |
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