Method for rapid, accurate measurement of step heights between dissimilar materials

A computerized phase shifting interferometer operates interactively with a user to correct surface profile data of a sample containing a film of material which is optically dissimilar to the material of a substrate. Profile data is measured, and optically dissimilar areas of the sample are identifie...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BROPHY, CHRIS P
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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