Method and apparatus for determining the field position of an integrated circuit within a reticle area

Apparatus for determining the field position (00, 01, 10, 11) of an integrated circuit (18) within a reticle area (12) which contains a plurality of such integrated circuits (14-20) includes a plurality of memory cells (76, 80) formed within the integrated circuit (18) for encoding the field positio...

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Bibliographische Detailangaben

Hauptverfasser:	SCHRECK, JOHN F, TRUONG, PHAT C
Format:	Patent
Sprache:	eng
Schlagworte:	INFORMATION STORAGE PHYSICS STATIC STORES
Online-Zugang:	Volltext bestellen
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