Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission

An apparatus and method for non-contact sensing electrical potentials of selected regions on the surface of a sample are provided. A typical sample is an integrated circuit, electronic device, or semiconductor material. The sample is positioned within a vacuum chamber and irradiated with an ultravio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FLESNER, LARRY D
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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