Hollow electrode plasma excitation source

A plasma source incorporates a furnace as a hollow anode, while a coaxial cathode is disposed therewithin. The source is located in a housing provided with an ionizable gas such that a glow discharge is produced between anode and cathode. Radiation or ionic emission from the glow discharge character...

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Bibliographische Detailangaben
Hauptverfasser: BALLOU, NATHAN E
Format: Patent
Sprache:eng
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