Method and apparatus for drawing patterns using an energy beam

According to the invention, in a method of drawing patterns by use of an energy beam, the amount of drawing data is reduced, the irregularity of an array of patterns is prevented, and the patterns are drawn with great accuracy. In a method of drawing a pattern including a plurality of patterns, the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GOTO, TAIZAN, SUZUKI, AKIRA, KATAYAMA, MITSUNOBU, KURASAWA, SHIRO, KUSUI, NAOKI, TANAKA, KATSUJI, WAKAZAKI, KUNIYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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