Magnetically filtered low loss scanning electron microscopy

An electron microscope which includes a detector (18) which is located in the magnetic field used to focus the primary electron beam onto the sample (10). The focussing magnetic field is used to energy-filter and/or energy analyze the scattered electrons without the need for additional equipment, su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HODGSON, RODNEY T, WELLS, OLIVER C, LEGOUES, FRANCOISE K
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!