Self-aligned gate process for fabricating field emitter arrays

Conical field emitter elements are formed on a surface of a substrate after which a layer of metal is deposited on top of the substrate surface and over the field emitter elements. A layer of oxide is then deposited over the metal layer. Another layer of metal is deposited over the layer of oxide to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MANOLY, ARTHUR E, ROLPH, RANDY K, LAMB, ARLENE E, LONGO, ROBERT T, FORMAN, RALPH, BARDAI, ZAHER
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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