Piezo-electric acceleration sensor

A piezo-electric acceleration sensor, including: a piezo-electric polymer membrane element having an element through-hole; a diaphragm having a diaphragm through-hole and attached to the piezo-electric membrane element so that the diaphragm hole is concentric to the element through-hole to form a la...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUNIMURA, SATOSHI, HIRAYAMA, TOSHIMITU, AKUTSU, MASAO, TAKAHASHI, KATSUHIKO, SHIGEMI, NAKAYAMA, SHIRO
Format: Patent
Sprache:eng
Schlagworte:
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