Mechanical probe for optical measurement of electrical potentials

A mechanical probe for optical measurement of electrical potentials. The probe of the present invention is composed of a cubic, electro-optical crystal fashioned in the form of a tip and of a metallization which is at ground potential and which covers the crystal with the exception of those surface...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	SOELKNER GERALD
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
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Beschreibung
Zusammenfassung:	A mechanical probe for optical measurement of electrical potentials. The probe of the present invention is composed of a cubic, electro-optical crystal fashioned in the form of a tip and of a metallization which is at ground potential and which covers the crystal with the exception of those surface regions located immediately opposite a measuring location, for example an interconnect of an integrated circuit. Since the metallization acting as a cooperating electrode significantly facilitates the penetration of the electrical stray field into the crystal tip, geometry-dependent effects and influences of electrical microfields are nearly completely supressed. The probe therefore makes it possible to utilize the voltage difference instead of the topography-dependent field difference for optical measurement of electrical signals with high chronological resolution.