Source of high flux energetic atoms

Method and apparatus for generating a nearly mono-energetic beam of atoms at velocities on the order of several km/s (energies of 1-10eV) and for achieving modification of the surface properties of a target (40) by the beam. A gas is forced through a nozzle throat (16) into a previously evacuated ex...

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Bibliographische Detailangaben

Hauptverfasser:	PIRRI, ANTHONY N, KRECH, ROBERT H, CALEDONIA, GEORGE E, GREEN, BYRON D
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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