Self contained surface contamination sensor for detecting external particulates and surface discontinuities

Contamination, either in the form of particulate matter (46), e.g., dust and non-wetting liquid, or surface discontinuities (48), such as a smooth film or cratering, is collected on an explosed glass plate (12). Illumination at an angle incident with respect to a surface (14) of the glass plate caus...

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Bibliographische Detailangaben

Hauptverfasser:	CHAMPETIER, ROBERT J
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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