Scanning electron microscope or similar equipment with tiltable microscope column

The specification describes a scanning electron microscope or similar equipment having a tiltable microscope column so as to observe a specimen at different angles without inclining the specimen. In order to make the microscope column tiltable relative to its specimen chamber, an opening is formed t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAZAKI, SHIGETOMO, ONOGUCHI, AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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