Apparatus for measuring specimen potential in electron microscope

An apparatus for measuring the specimen potential in an electron microscope includes a first grid arranged to enclose a specimen which is to be irradiated with a primary charged particle beam emitted from the electron source of the electron microscope and to which is supplied a voltage sufficient to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TODOKORO, HIDEO, FUKUHARA, SATORU, SAKITANI, YOSHIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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