Method of making a dual DMOS device by ion implantation and diffusion

A diffused MOS (DMOS) device and method for making same are disclosed. The prior art DMOS device is improved upon by ion implanting a depletion extension LD to the drain. However, the introduction of the depletion extension LD introduces a manufacturing statistical variation in the characteristics o...

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Bibliographische Detailangaben
Hauptverfasser: BERTIN, CLAUDE L, DE LA MONEDA, FRANCISCO H, SODERMAN, DONALD A
Format: Patent
Sprache:eng
Schlagworte:
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