Automated electrical resistivity measuring apparatus for semiconductor crystal rods

Automated electrical resistivity measuring apparatus for semiconductor crystal rods

A semiconductor crystal resistivity measuring station comprised of an enclosed automatically operated probe apparatus electrically connected to a remotely controlled power supply and an electronic computer for automatically executing precise electrical resistivity measurements, in consecutive increm...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DIEHL, JOSEPH O, MASON, LAWRENCE D, VERES, DAVID R, GERMANO, CARL A
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A semiconductor crystal resistivity measuring station comprised of an enclosed automatically operated probe apparatus electrically connected to a remotely controlled power supply and an electronic computer for automatically executing precise electrical resistivity measurements, in consecutive increments along a single crystal length.