Method of tunnel containing structures

A tunnel containing structure which is capable of functioning as a magnetic memory device, a circuit device, such as a fluid circuit device, or the like and which is primarily constructed from photo-resist materials using photographic techniques. The tunnel containing structure is made by depositing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PITTMAN, RICHARD D, JOHNSON, RONALD E, GROSSMAN, NORMAN J
Format: Patent
Sprache:eng
Schlagworte:
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