MICROELECTRIC HEAT EXCHANGER PEDESTAL

A microelectric wafer or chip vacuum chuck in the form of a heat exchanger pedestal with a heat exchanger pressure vessel at the pedestal top through which hot and cold fluids are selectively pumped in circulation from and return to, respectively, hot and cold remote fluid reservoirs. A plurality of...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HAGGE J,KE, JOHNSON F,US
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator HAGGE J,KE
JOHNSON F,US
description A microelectric wafer or chip vacuum chuck in the form of a heat exchanger pedestal with a heat exchanger pressure vessel at the pedestal top through which hot and cold fluids are selectively pumped in circulation from and return to, respectively, hot and cold remote fluid reservoirs. A plurality of small diameter vacuum tubes pierce the heat exchanger pressure vessel and are brazed at each end to upper and lower plates with the top of the upper plate being the chuck surface with the vacuum tubes providing frequent tension ties between the plates. Dry nitrogen is fed into and through a circumferential passageway about the pedestal to protect wafers and chips with an inert cover atmosphere from oxidation damage at high temperatures or frost damage at low temperatures.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US3710251A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US3710251A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US3710251A3</originalsourceid><addsrcrecordid>eNrjZFD19XQO8nf1cXUOCfJ0VvBwdQxRcI1w9nD0c3cNUghwdXENDnH04WFgTUvMKU7lhdLcDPJuriHOHrqpBfnxqcUFicmpeakl8aHBxuaGBkamho7GhFUAABqVIoo</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MICROELECTRIC HEAT EXCHANGER PEDESTAL</title><source>esp@cenet</source><creator>HAGGE J,KE ; JOHNSON F,US</creator><creatorcontrib>HAGGE J,KE ; JOHNSON F,US</creatorcontrib><description>A microelectric wafer or chip vacuum chuck in the form of a heat exchanger pedestal with a heat exchanger pressure vessel at the pedestal top through which hot and cold fluids are selectively pumped in circulation from and return to, respectively, hot and cold remote fluid reservoirs. A plurality of small diameter vacuum tubes pierce the heat exchanger pressure vessel and are brazed at each end to upper and lower plates with the top of the upper plate being the chuck surface with the vacuum tubes providing frequent tension ties between the plates. Dry nitrogen is fed into and through a circumferential passageway about the pedestal to protect wafers and chips with an inert cover atmosphere from oxidation damage at high temperatures or frost damage at low temperatures.</description><language>eng</language><subject>MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; TESTING</subject><creationdate>1973</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19730109&amp;DB=EPODOC&amp;CC=US&amp;NR=3710251A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19730109&amp;DB=EPODOC&amp;CC=US&amp;NR=3710251A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HAGGE J,KE</creatorcontrib><creatorcontrib>JOHNSON F,US</creatorcontrib><title>MICROELECTRIC HEAT EXCHANGER PEDESTAL</title><description>A microelectric wafer or chip vacuum chuck in the form of a heat exchanger pedestal with a heat exchanger pressure vessel at the pedestal top through which hot and cold fluids are selectively pumped in circulation from and return to, respectively, hot and cold remote fluid reservoirs. A plurality of small diameter vacuum tubes pierce the heat exchanger pressure vessel and are brazed at each end to upper and lower plates with the top of the upper plate being the chuck surface with the vacuum tubes providing frequent tension ties between the plates. Dry nitrogen is fed into and through a circumferential passageway about the pedestal to protect wafers and chips with an inert cover atmosphere from oxidation damage at high temperatures or frost damage at low temperatures.</description><subject>MEASURING</subject><subject>MEASURING ELECTRIC VARIABLES</subject><subject>MEASURING MAGNETIC VARIABLES</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1973</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFD19XQO8nf1cXUOCfJ0VvBwdQxRcI1w9nD0c3cNUghwdXENDnH04WFgTUvMKU7lhdLcDPJuriHOHrqpBfnxqcUFicmpeakl8aHBxuaGBkamho7GhFUAABqVIoo</recordid><startdate>19730109</startdate><enddate>19730109</enddate><creator>HAGGE J,KE</creator><creator>JOHNSON F,US</creator><scope>EVB</scope></search><sort><creationdate>19730109</creationdate><title>MICROELECTRIC HEAT EXCHANGER PEDESTAL</title><author>HAGGE J,KE ; JOHNSON F,US</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US3710251A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1973</creationdate><topic>MEASURING</topic><topic>MEASURING ELECTRIC VARIABLES</topic><topic>MEASURING MAGNETIC VARIABLES</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HAGGE J,KE</creatorcontrib><creatorcontrib>JOHNSON F,US</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HAGGE J,KE</au><au>JOHNSON F,US</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MICROELECTRIC HEAT EXCHANGER PEDESTAL</title><date>1973-01-09</date><risdate>1973</risdate><abstract>A microelectric wafer or chip vacuum chuck in the form of a heat exchanger pedestal with a heat exchanger pressure vessel at the pedestal top through which hot and cold fluids are selectively pumped in circulation from and return to, respectively, hot and cold remote fluid reservoirs. A plurality of small diameter vacuum tubes pierce the heat exchanger pressure vessel and are brazed at each end to upper and lower plates with the top of the upper plate being the chuck surface with the vacuum tubes providing frequent tension ties between the plates. Dry nitrogen is fed into and through a circumferential passageway about the pedestal to protect wafers and chips with an inert cover atmosphere from oxidation damage at high temperatures or frost damage at low temperatures.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US3710251A
source esp@cenet
subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title MICROELECTRIC HEAT EXCHANGER PEDESTAL
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-06T17%3A46%3A20IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=HAGGE%20J,KE&rft.date=1973-01-09&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS3710251A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true