MEMS SOLENOID TRANSFORMER AND MANUFACTURING METHOD THEREOF

Embodiments of the present application provide a MEMS solenoid transformer, comprising a silicon substrate, a soft magnetic core, a first solenoid and a second solenoid; wherein, the soft magnetic core is wrapped inside the silicon substrate, the silicon substrate is provided with a first spiral cha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XU, Tiantong, ZHAI, Yanxin, WANG, Wenbin, FANG, Weidong, LI, Haiwang, ZHU, Kaiyun, TAO, Zhi, WU, Hanxiao, CAO, Xiaoda
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY INDUCTANCES MAGNETS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES TRANSFORMERS
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