POLARIZATION-INVERTED HIGHER-ORDER PLATE-MODE RESONATORS AND METHODS FOR MAKING THE SAME
Disclosed are polarization-inverted higher-order plate-mode resonators and methods for making the same. In an aspect, a plate-mode resonator includes a first piezoelectric layer having a first crystal orientation specified by a first set of Euler angles α1, β1, and γ1, a dielectric layer disposed on...
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