SEMICONDUCTOR DEVICES HAVING A SEAL RING

SEMICONDUCTOR DEVICES HAVING A SEAL RING

A semiconductor device includes a substrate having a first region and a second region surrounding the first region, an integrated circuit structure disposed on the first region, and a seal ring structure disposed on the second region, wherein the integrated circuit structure includes a first active...

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Hauptverfasser: Rhee, Hwasung, Kim, Hyokyeom, Cha, Joonil, Namgung, In, Kim, Youngshil
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator Rhee, Hwasung
Kim, Hyokyeom
Cha, Joonil
Namgung, In
Kim, Youngshil
description A semiconductor device includes a substrate having a first region and a second region surrounding the first region, an integrated circuit structure disposed on the first region, and a seal ring structure disposed on the second region, wherein the integrated circuit structure includes a first active fin extending on the first region in a crystal direction of the substrate, a first epitaxial pattern disposed on one region of the first active fin, and a first contact structure connected to the first epitaxial pattern, and the seal ring structure includes a second active fin extending on the second region in a crystal direction of the substrate, a second epitaxial pattern disposed on the second active fin and including the same material as that of the first epitaxial pattern, and a second contact structure connected to the second epitaxial pattern.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SEMICONDUCTOR DEVICES HAVING A SEAL RING
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