OPTICAL INTERFERENCE FILTER

In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride...

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Bibliographische Detailangaben
Hauptverfasser: HENDRIX, Karen Denise, OCKENFUSS, Georg J, YANG, Jinhui, GRIGONIS, Marius, SHKABKO, Andy
Format: Patent
Sprache:eng
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