METHOD OF DETERMINING A PERFORMANCE PARAMETER DISTRIBUTION

A method of determining a performance parameter distribution and/or associated quantile function. The method includes obtaining a quantile function prediction model operable to predict a quantile value for a substrate position and given quantile probability such that the predicted quantile values va...

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Hauptverfasser: WILDENBERG, Jochem Sebastiaan, URBANCZYK, Adam Jan, VAN WIJK, Robert Jan, THEEUWES, Thomas, BASTANI, Vahid, KNOPS, Raoul Maarten Simon
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creator WILDENBERG, Jochem Sebastiaan
URBANCZYK, Adam Jan
VAN WIJK, Robert Jan
THEEUWES, Thomas
BASTANI, Vahid
KNOPS, Raoul Maarten Simon
description A method of determining a performance parameter distribution and/or associated quantile function. The method includes obtaining a quantile function prediction model operable to predict a quantile value for a substrate position and given quantile probability such that the predicted quantile values vary monotonically as a function of quantile probability and using the trained quantile 5 function prediction model to predict quantile values for a plurality of different quantile probabilities for one or more locations on the substrate.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2024402618A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2024402618A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2024402618A13</originalsourceid><addsrcrecordid>eNrjZLDydQ3x8HdR8HdTcHENcQ3y9fTz9HNXcFQIcA1y8w_ydfRzdlUIcAxy9AXJKrh4BocEeTqFhnj6-_EwsKYl5hSn8kJpbgZlN9cQZw_d1IL8-NTigsTk1LzUkvjQYCMDIxMTAyMzQwtHQ2PiVAEAX4gqDw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHOD OF DETERMINING A PERFORMANCE PARAMETER DISTRIBUTION</title><source>esp@cenet</source><creator>WILDENBERG, Jochem Sebastiaan ; URBANCZYK, Adam Jan ; VAN WIJK, Robert Jan ; THEEUWES, Thomas ; BASTANI, Vahid ; KNOPS, Raoul Maarten Simon</creator><creatorcontrib>WILDENBERG, Jochem Sebastiaan ; URBANCZYK, Adam Jan ; VAN WIJK, Robert Jan ; THEEUWES, Thomas ; BASTANI, Vahid ; KNOPS, Raoul Maarten Simon</creatorcontrib><description>A method of determining a performance parameter distribution and/or associated quantile function. The method includes obtaining a quantile function prediction model operable to predict a quantile value for a substrate position and given quantile probability such that the predicted quantile values vary monotonically as a function of quantile probability and using the trained quantile 5 function prediction model to predict quantile values for a plurality of different quantile probabilities for one or more locations on the substrate.</description><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20241205&amp;DB=EPODOC&amp;CC=US&amp;NR=2024402618A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20241205&amp;DB=EPODOC&amp;CC=US&amp;NR=2024402618A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WILDENBERG, Jochem Sebastiaan</creatorcontrib><creatorcontrib>URBANCZYK, Adam Jan</creatorcontrib><creatorcontrib>VAN WIJK, Robert Jan</creatorcontrib><creatorcontrib>THEEUWES, Thomas</creatorcontrib><creatorcontrib>BASTANI, Vahid</creatorcontrib><creatorcontrib>KNOPS, Raoul Maarten Simon</creatorcontrib><title>METHOD OF DETERMINING A PERFORMANCE PARAMETER DISTRIBUTION</title><description>A method of determining a performance parameter distribution and/or associated quantile function. The method includes obtaining a quantile function prediction model operable to predict a quantile value for a substrate position and given quantile probability such that the predicted quantile values vary monotonically as a function of quantile probability and using the trained quantile 5 function prediction model to predict quantile values for a plurality of different quantile probabilities for one or more locations on the substrate.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLDydQ3x8HdR8HdTcHENcQ3y9fTz9HNXcFQIcA1y8w_ydfRzdlUIcAxy9AXJKrh4BocEeTqFhnj6-_EwsKYl5hSn8kJpbgZlN9cQZw_d1IL8-NTigsTk1LzUkvjQYCMDIxMTAyMzQwtHQ2PiVAEAX4gqDw</recordid><startdate>20241205</startdate><enddate>20241205</enddate><creator>WILDENBERG, Jochem Sebastiaan</creator><creator>URBANCZYK, Adam Jan</creator><creator>VAN WIJK, Robert Jan</creator><creator>THEEUWES, Thomas</creator><creator>BASTANI, Vahid</creator><creator>KNOPS, Raoul Maarten Simon</creator><scope>EVB</scope></search><sort><creationdate>20241205</creationdate><title>METHOD OF DETERMINING A PERFORMANCE PARAMETER DISTRIBUTION</title><author>WILDENBERG, Jochem Sebastiaan ; URBANCZYK, Adam Jan ; VAN WIJK, Robert Jan ; THEEUWES, Thomas ; BASTANI, Vahid ; KNOPS, Raoul Maarten Simon</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2024402618A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2024</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>WILDENBERG, Jochem Sebastiaan</creatorcontrib><creatorcontrib>URBANCZYK, Adam Jan</creatorcontrib><creatorcontrib>VAN WIJK, Robert Jan</creatorcontrib><creatorcontrib>THEEUWES, Thomas</creatorcontrib><creatorcontrib>BASTANI, Vahid</creatorcontrib><creatorcontrib>KNOPS, Raoul Maarten Simon</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WILDENBERG, Jochem Sebastiaan</au><au>URBANCZYK, Adam Jan</au><au>VAN WIJK, Robert Jan</au><au>THEEUWES, Thomas</au><au>BASTANI, Vahid</au><au>KNOPS, Raoul Maarten Simon</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD OF DETERMINING A PERFORMANCE PARAMETER DISTRIBUTION</title><date>2024-12-05</date><risdate>2024</risdate><abstract>A method of determining a performance parameter distribution and/or associated quantile function. The method includes obtaining a quantile function prediction model operable to predict a quantile value for a substrate position and given quantile probability such that the predicted quantile values vary monotonically as a function of quantile probability and using the trained quantile 5 function prediction model to predict quantile values for a plurality of different quantile probabilities for one or more locations on the substrate.</abstract><oa>free_for_read</oa></addata></record>
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title METHOD OF DETERMINING A PERFORMANCE PARAMETER DISTRIBUTION
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-23T04%3A38%3A15IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=WILDENBERG,%20Jochem%20Sebastiaan&rft.date=2024-12-05&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2024402618A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true