PROCESS FOR PRODUCING A SINGLE CRYSTAL FROM SILICON

A process produces a single crystal of silicon. The process includes: installing a feed rod in a float-zone apparatus, having a diameter between 230-270 mm; installing a first hollow cylinder having an internal diameter larger, by 30-50 mm, than the feed rod's diameter; installing a second holl...

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Bibliographische Detailangaben
Hauptverfasser: HAECKL, Walter, VIRBULIS, Janis, SUROVOVS, Maksims, SATTLER, Andreas, RATNIEKS, Gundars
Format: Patent
Sprache:eng
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