PHASE CHANGE MATERIAL SWITCH CIRCUIT FOR ENHANCED SIGNAL ISOLATION AND METHODS OF FORMING THE SAME

A device structure includes a first series connection of a first phase change memory (PCM) switch and a second PCM switch. The first PCM switch includes a first heater line, a first PCM line, and a first contact electrode and a second contact electrode located on the first heater line. The second PC...

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Bibliographische Detailangaben
Hauptverfasser: Ting, Yu-Wei, Li, Hung-Ju, Chang, Kuo-Pin, Huang, Kuo-Ching, Hsieh, Wei Ting
Format: Patent
Sprache:eng
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