PACKAGED ACOUSTIC WAVE DEVICES WITH MULTILAYER PIEZOELECTRIC SUBSTRATE

A packaged acoustic wave component is disclosed. The packaged acoustic wave component can include a wafer level packaging structure having a shield structure base, a multi-layer piezoelectric substrate including a piezoelectric layer and a support substrate, and an interdigital transducer electrode...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Goto, Rei, Fukuhara, Hironori
Format: Patent
Sprache:eng
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