FEEDBACK LOOP FOR CONTROLLING A PULSED VOLTAGE WAVEFORM

Embodiments of this disclosure describe a feedback loop that can be used to maintain a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate. The system described herein consequently enables a precise control over the shape of IEDF and the profile of...

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Bibliographische Detailangaben

Hauptverfasser:	LUERE, Olivier, DHINDSA, Rajinder, ROGERS, James, PLOTNIKOV, Viacheslav, DORF, Leonid, KAMENETSKIY, Evgeny
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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