SEMICONDUCTOR DEVICES WITH ENHANCED CARRIER MOBILITY

A semiconductor structure and a method of forming the same are provided. In an embodiment, an exemplary semiconductor method includes forming a fin-shaped structure extending from a substrate, the fin-shaped structure includes a number of channel layers interleaved by a number of sacrificial layers,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lin, Chia-Pin, Lee, Wei-Yang, Li, Ming-Shuan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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