ON-CHIP NANOSCALE DIFFRACTIVE OPTICAL ELEMENT
A diffractive optical element (DOE) includes a substrate layer; and a nanostructure layer comprising nanostructures having a predetermined periodicity ranging from 0.75λ to 3λ of a target wavelength λ. The nanostructures are pillar-shaped nanostructures formed on a surface of the substrate layer, ho...
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| creator | WANG, Yibing Michelle HANANIA, Haeri Park SIDDIQUE, Radwanul Hasan TORFEH, Mahsa |
| description | A diffractive optical element (DOE) includes a substrate layer; and a nanostructure layer comprising nanostructures having a predetermined periodicity ranging from 0.75λ to 3λ of a target wavelength λ. The nanostructures are pillar-shaped nanostructures formed on a surface of the substrate layer, holes formed in the substrate layer, or a combination thereof. At least one nanostructure has a plan-view cross-sectional shape of a circle, an oval, a square, or a rectangle. The plan-view cross-sectional shape of at least one nanostructure includes a rounded corner having a corner radius selected based on a desired light dot nonuniformity of a diffraction pattern generated by the DOE. When the nanostructures are pillar-shaped, a refractive index of the nanostructures is greater than a refractive index of the substrate layer. When the nanostructures are holes, a refractive index of the nanostructures is less than a refractive index of the substrate layer. |
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| subjects | MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING |
| title | ON-CHIP NANOSCALE DIFFRACTIVE OPTICAL ELEMENT |
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