SEMICONDUCTOR DEVICE STRUCTURE AND METHODS OF FORMING THE SAME

Semiconductor device structure and methods of forming the same are described. The structure includes a first dielectric layer including a first portion disposed over a source/drain region in an active region of a substrate and a modulation portion over an interlayer dielectric (ILD) in a resistor re...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LU, Hsueh-Han, CHEN, Kun-Ei, WANG, Ling-Sung, CHIANG, Chen-Chieh, NIAN, Jun-Nan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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