STACKED SEMICONDUCTOR STRUCTURE

In some embodiments, the present disclosure relates to an integrated chip structure. The integrated chip structure includes at least one device on a front side of a semiconductor substrate. A plurality of grating layers are under the at least one device. The plurality of grating layers include at le...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Huang, Cheng Yu, Chou, Keng-Yu, Tseng, Chien-Hsien, Wu, Wen-Hau, Hashimoto, Kazuaki, Chuang, Chun-Hao, Chiang, Wei-Chieh
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!