CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE

An object of the invention is to provide a charged particle beam apparatus capable of acquiring an observation image having a high contrast in a sample whose light absorption characteristic depends on a light wavelength. The charged particle beam apparatus according to the invention irradiates the s...

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Hauptverfasser: SHOUJI, Minami, TSUNO, Natsuki, KAWANO, Hajime, OHTA, Hiroya, BIZEN, Daisuke
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator SHOUJI, Minami
TSUNO, Natsuki
KAWANO, Hajime
OHTA, Hiroya
BIZEN, Daisuke
description An object of the invention is to provide a charged particle beam apparatus capable of acquiring an observation image having a high contrast in a sample whose light absorption characteristic depends on a light wavelength. The charged particle beam apparatus according to the invention irradiates the sample with light, generates an observation image of the sample, changes an irradiation intensity per unit time of the light, and then generates a plurality of the observation images having different contrasts.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title CHARGED PARTICLE BEAM DEVICE
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