MULTIFUNCTIONAL COLLIMATOR FOR CONTACT IMAGE SENSORS

Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PAN, Han-Zong, LIU, Yen Chiang, HSU, Hsi-Cheng, LI, Chun-Peng, HU, Ching-Hsiang, TU, Li-Yang, CHEN, Hsin-Yu, SANAGAVARAPU, Lavanya, CHIANG, Ji-Hong, CHEN, Shin-Hua, WENG, Jui-Chun, JHANG, You-Cheng, WU, Wei-Ding, LI, Jia-Syuan, HUNG, Chia-Chun, CHIOU, Jiun-Jie
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES
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