POLISHING METHOD, COMPUTER-READABLE STORAGE MEDIUM STORING PROGRAM FOR OPERATING COMPUTER, AND POLISHING APPARATUS

A polishing method includes: during polishing of the workpiece, creating a reference spectrum history and a monitoring spectrum history by repeatedly producing a reference spectrum and a monitoring spectrum at two points on the workpiece; calculating a plurality of reference history differences that...

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Hauptverfasser:	SHIOKAWA, Yoichi, WATANABE, Yuki, SASAKI, Toshimitsu, KABASAWA, Masashi, YAGI, Keita
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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creator	SHIOKAWA, Yoichi WATANABE, Yuki SASAKI, Toshimitsu KABASAWA, Masashi YAGI, Keita
description	A polishing method includes: during polishing of the workpiece, creating a reference spectrum history and a monitoring spectrum history by repeatedly producing a reference spectrum and a monitoring spectrum at two points on the workpiece; calculating a plurality of reference history differences that are differences between a latest monitoring spectrum and a plurality of reference spectra in the reference spectrum history; calculating a plurality of monitoring history differences that are differences between a latest reference spectrum and a plurality of monitoring spectra in the monitoring spectrum history; calculating a film-thickness difference between a monitoring point and a reference point based on a local minimum point of a reference history difference or a monitoring history difference.
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subjects	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
title	POLISHING METHOD, COMPUTER-READABLE STORAGE MEDIUM STORING PROGRAM FOR OPERATING COMPUTER, AND POLISHING APPARATUS
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