BULK ACOUSTIC WAVE DEVICE STRUCTURE WITH CIRCUIT ELEMENT INCLUDING BURIED CONDUCTOR

BULK ACOUSTIC WAVE DEVICE STRUCTURE WITH CIRCUIT ELEMENT INCLUDING BURIED CONDUCTOR

Aspects of this disclosure relate to a bulk acoustic wave structure that includes a bulk acoustic wave resonator and a circuit element electrically connected to the bulk acoustic wave resonator. The circuit element can include conductive material buried in a dielectric layer. The dielectric layer ca...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shin, Kwang Jae, Feld, David Albert, Cao, Zongliang, Kovacic, Stephen Joseph, Shirakawa, Alexandre Augusto, Lee, Jae Hyung, Shon, Taecheol
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Beschreibung
Zusammenfassung:Aspects of this disclosure relate to a bulk acoustic wave structure that includes a bulk acoustic wave resonator and a circuit element electrically connected to the bulk acoustic wave resonator. The circuit element can include conductive material buried in a dielectric layer. The dielectric layer can extend under an acoustic reflector of the bulk acoustic wave resonator. In certain embodiments, the circuit element can be an inductor, a tuning stub, or a fuse element. Related filters, multiplexers, radio frequency modules, radio frequency systems, wireless communication devices, and methods are disclosed.