STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH CAPACITORS

The present disclosure relates to a semiconductor structure. The semiconductor structure includes a first electrode over a substrate. A first capacitor dielectric layer is over an upper surface of the first electrode. The upper surface of the first electrode laterally extends to opposing outermost s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chung, Chiu-Hua, Chang, Chen-Chien, Luo, Guo-Jyun, Pan, Han-Zong, Lin, Shiuan-Jeng
Format: Patent
Sprache:eng
Schlagworte:
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