PAD-IN-A-BOTTLE (PIB) TECHNOLOGY FOR COPPER BARRIER SLURRIES

A novel pad-in-a-bottle (PIB) technology for advanced chemical-mechanical planarization (CMP) copper barrier CMP compositions, systems and processes has been disclosed for use with polyurethane-based polishing pads having a plurality of asperities. The CMP composition comprises abrasives, polyuretha...

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Bibliographische Detailangaben
Hauptverfasser: Vacassy, Robert, Philipossian, Ara, O'Neill, Mark Leonard, Langan, John G, Sampurno, Yasa, Schlueter, Jame Allen, Shi, Xiaobo
Format: Patent
Sprache:eng
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