THIN-FILM CRYSTALLINE STRUCTURE WITH SURFACES HAVING SELECTED PLANE ORIENTATIONS

A method of forming a thin film structure involves performing one or more repetitions to form a template on a wafer. The repetitions include: depositing a layer of a template material to a thickness; and ion beam milling the layer of the template material to remove thickness less than the first thic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Zhao, Tong, Wan, Li, Kautzky, Michael Christopher
Format: Patent
Sprache:eng
Schlagworte:
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