TUNABLE W-SHAPED PROFILE FOR STRUCTURES

Provided are structures and methods for forming structures with surfaces having a W-shaped profile. An exemplary method includes differentially etching a gate material to a recessed surface including a first and second horn and a valley located therebetween including first and second sections and a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Pan, Tzu-Wen, Liang, Chia Ming, Lin, Yih-Ann, Yang, Jih-Sheng, Lin, Yu-Hsien, Chen, Ryan Chia-Jen, Yin, Li-Wei, Chao, Shih-Chieh
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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