METROLOGY TARGET OPTIMIZATION

A method of designing a target includes obtaining a model of an initial dataset, performing a Bayesian optimization using the model which provides an improved model, and performing an optimization of the target design using the improved model.

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	PISARENCO, Maxim, MIDDLEBROOKS, Scott Anderson, HELFENSTEIN, Patrick Philipp, VAN KRAAIJ, Markus Gerardus Martinus Maria
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A method of designing a target includes obtaining a model of an initial dataset, performing a Bayesian optimization using the model which provides an improved model, and performing an optimization of the target design using the improved model.