Spectroscopic Device and Shape Measurement Device

A spectroscopic device includes: an analysis optical system; a length measurement optical system; and a calculation device. The analysis optical system includes a moving mirror and a first light receiving element. The length measurement optical system includes a second light source configured to emi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMADA, Kohei, HAYASHI, Nobuhito
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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