METHOD OF LIQUID MANAGEMENT IN ANODE CHAMBER AND APPARATUS FOR PLATING

There is provided a method of liquid management in an anode chamber. The method comprises providing a plating tank that comprises an anode; a barrier membrane placed to come into contact with or to be brought into close contact with an upper face of the anode; a cathode chamber on an upper side and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MASUDA, Yasuyuki, TOMITA, Masaki
Format: Patent
Sprache:eng
Schlagworte:
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