SYSTEMS AND METHODS FOR MONITORING OF A CONTROLLED ENVIRONMENT IN A SUBSTRATE PROCESSING SYSTEM

Aspects of the disclosure relate to a substrate processing system having a controlled environment comprising one or more FOUPs configured to hold one or more substrates, a substrate processing chamber configured to process the substrate(s), a substrate handling and transporting system configured to...

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Bibliographische Detailangaben

Hauptverfasser:	Jongbloed, Bert, van der Star, Gido
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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