SHUTTER APPARATUS HAVING PORTS TO CONTROL ENERGY BEAM AND GAS TRANSFER BETWEEN ZONES

A shutter apparatus and method that intermittently establishes a pathway between a first zone having a high pressure atmosphere and a second zone having a low pressure atmosphere. The shutter apparatus includes a first port adjacent to the high pressure atmosphere and a second port adjacent to the l...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Johnston, Chet Alister, Herring, Cyrus M, Pugh, Steven Franklin
Format: Patent
Sprache:eng
Schlagworte:
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