SHUTTER APPARATUS HAVING PORTS TO CONTROL ENERGY BEAM AND GAS TRANSFER BETWEEN ZONES

A shutter apparatus and method that intermittently establishes a pathway between a first zone having a high pressure atmosphere and a second zone having a low pressure atmosphere. The shutter apparatus includes a first port adjacent to the high pressure atmosphere and a second port adjacent to the l...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Johnston, Chet Alister, Herring, Cyrus M, Pugh, Steven Franklin
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A shutter apparatus and method that intermittently establishes a pathway between a first zone having a high pressure atmosphere and a second zone having a low pressure atmosphere. The shutter apparatus includes a first port adjacent to the high pressure atmosphere and a second port adjacent to the low pressure atmosphere. An actuator of the shutter apparatus opens and closes off the first port to the second port to establish the pathway and permit transmission of an energy beam between the zones while minimizing transfer of gas from the high pressure atmosphere to the low pressure atmosphere.