ELECTROMECHANICAL SWITCH

An apparatus includes a semiconductor structure having a cavity. The apparatus also includes a first electrical terminal on a first cavity side, a second electrical terminal on a second cavity side, and the second electrical terminal including an extension that overlaps part of the cavity. The appar...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Fruehling, Adam, Summerfelt, Scott
Format: Patent
Sprache:eng
Schlagworte:
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